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SURMIN575 SURMIN7106 SURMIN9128 SURMIN12158
Smart, convenient and precise
A new generation of ultra-high-precision measurement platform, new industrial appearance and ergonomic design, using AN SYS finite element algorithm to redesign and optimize the structure.
The introduction of new materials and the use of nanometer-level measurement benchmarks is only to improve the accuracy of measurement.
Hardware standards are further improved. From R&D design to material selection and processing, every link is the most stringent quality standard, just to pursue the limit of hardware precision.
High-precision position loop encoder, only to improve the response capability of the system.
Brand-new measurement software and measurement configuration, diversified and easy-to-control, convenient operation, rich interfaces, and interactive and friendly human-machine interface form a seamless connection with the control and sensor system, making measurement tasks simple and fun.
The indication error of 0.65um and the repeatability of 0.27um provide reliable data support for the user's quality inspection process.
Drive System
The machine adopts USA AMETEK servo motor to realize sub-micron grade positional accuracy;
Position Feedback System
Using RENISHAW high precision stainless steel grating ruler and RTLC+TONIC reading head, which resolution can reach SOnm and speed can reach 800mm/s; Temperature-compensated System
Real-time temperature-compensated system: adopts international advanced temperature sensor as the measuring basis. The measuring accuracy is ±0.05X2.
Transmission System
It is adopted with steel wire transmission system which is our patent technology (ZL 201420529248.2).
Parameters:
Items | Surmin575 | Surmin7106 | Surmin9128 |
Measuring Range | 500*700*500 | 700*1000*600 | 900*1200*800 |
MPEe | 0.65+2.0L/1000 | 0.8+2.0L/1000 | 1.2+2.0L/1000 |
MPEp | 0.65 | 0.8 | 1.2 |
Dimension（mm） | 1690*2220*2666 | 1890*2520*2866 | 2090*2720*3266 |
Max. Loading(kg) | 900 | 1000 | 1300 |
Weight(kg) | 2850 | 3100 | 3900 |
Main Box Size | 2220*1860*2045 | 2520*2060*2145 | 2720*2260*2345 |
Main Box Weight | 3120 | 3380 | 4200 |
Accessory Box Size | 2936*1716*1048 | 2936*1716*1048 | 2936*1716*1048 |
Accessory Box Weight | 420 | 450 | 500 |
Moving Speed | 800 | 800 | 800 |
Accelerated Speed | 1800 | 1800 | 1800 |
Specifications：
1. Using ANSYS finite element algorithm of three axis recent guide rail, precision design optimization, rectangular beams and closed frame structure design of the X axis and Z axis is using all sides surrounded by static pressure type air bearing structure and organ type dustproof design and technical characteristics, the whole machine of the application of new materials and NANO technology patent new technology and structure;
2. The mechanical overall structure adopts strong rigidity, light weight and close frame movable bridge structure, which is simple, compact and has strong loaded capacity and good moving performance.
3. Y-axis guide-way adopts dove tail type, which has high precision and good stability.
4.Drive system adopts unique patent (Patent NO. ZL 2014 2 0529248.2) wire transmission, which Guarantee the drive’s fastness, precision and perfect movement.
5. Z axis adopts ceramic material, high strength sintered ceramic material with high strength, high surface finish
6.Three axis' adoption of quiescent air pressure air-bearing guide way, comprised of air bearings which are self-cleaning, pre-loading and high precision.
7. Using imported RTLC + TONIC combination as a length measurement datum, the standard of 50 nm ultra-high resolution to provide reliable measurement benchmark.
8.Transmission adopt international famous brand AMETEK PITTMAN, M series as the DC servo motor speed loop drive unit.
9. Software provides a powerful platform to develop and run test procedure.
10. Triaxial guide work adopts RENISHAW six linear compensation unit and two work-piece compensation unit, ensure the accuracy and reliability of real-time compensation, greatly reduces the limitations of measuring the required environment;
Probe Choices:
| PH10M+SP25 | REVO | |
 |  |  |
Details:
 |  |  |
Smart, convenient and precise
A new generation of ultra-high-precision measurement platform, new industrial appearance and ergonomic design, using AN SYS finite element algorithm to redesign and optimize the structure.
The introduction of new materials and the use of nanometer-level measurement benchmarks is only to improve the accuracy of measurement.
Hardware standards are further improved. From R&D design to material selection and processing, every link is the most stringent quality standard, just to pursue the limit of hardware precision.
High-precision position loop encoder, only to improve the response capability of the system.
Brand-new measurement software and measurement configuration, diversified and easy-to-control, convenient operation, rich interfaces, and interactive and friendly human-machine interface form a seamless connection with the control and sensor system, making measurement tasks simple and fun.
The indication error of 0.65um and the repeatability of 0.27um provide reliable data support for the user's quality inspection process.
Drive System
The machine adopts USA AMETEK servo motor to realize sub-micron grade positional accuracy;
Position Feedback System
Using RENISHAW high precision stainless steel grating ruler and RTLC+TONIC reading head, which resolution can reach SOnm and speed can reach 800mm/s; Temperature-compensated System
Real-time temperature-compensated system: adopts international advanced temperature sensor as the measuring basis. The measuring accuracy is ±0.05X2.
Transmission System
It is adopted with steel wire transmission system which is our patent technology (ZL 201420529248.2).
Parameters:
Items | Surmin575 | Surmin7106 | Surmin9128 |
Measuring Range | 500*700*500 | 700*1000*600 | 900*1200*800 |
MPEe | 0.65+2.0L/1000 | 0.8+2.0L/1000 | 1.2+2.0L/1000 |
MPEp | 0.65 | 0.8 | 1.2 |
Dimension（mm） | 1690*2220*2666 | 1890*2520*2866 | 2090*2720*3266 |
Max. Loading(kg) | 900 | 1000 | 1300 |
Weight(kg) | 2850 | 3100 | 3900 |
Main Box Size | 2220*1860*2045 | 2520*2060*2145 | 2720*2260*2345 |
Main Box Weight | 3120 | 3380 | 4200 |
Accessory Box Size | 2936*1716*1048 | 2936*1716*1048 | 2936*1716*1048 |
Accessory Box Weight | 420 | 450 | 500 |
Moving Speed | 800 | 800 | 800 |
Accelerated Speed | 1800 | 1800 | 1800 |
Specifications：
1. Using ANSYS finite element algorithm of three axis recent guide rail, precision design optimization, rectangular beams and closed frame structure design of the X axis and Z axis is using all sides surrounded by static pressure type air bearing structure and organ type dustproof design and technical characteristics, the whole machine of the application of new materials and NANO technology patent new technology and structure;
2. The mechanical overall structure adopts strong rigidity, light weight and close frame movable bridge structure, which is simple, compact and has strong loaded capacity and good moving performance.
3. Y-axis guide-way adopts dove tail type, which has high precision and good stability.
4.Drive system adopts unique patent (Patent NO. ZL 2014 2 0529248.2) wire transmission, which Guarantee the drive’s fastness, precision and perfect movement.
5. Z axis adopts ceramic material, high strength sintered ceramic material with high strength, high surface finish
6.Three axis' adoption of quiescent air pressure air-bearing guide way, comprised of air bearings which are self-cleaning, pre-loading and high precision.
7. Using imported RTLC + TONIC combination as a length measurement datum, the standard of 50 nm ultra-high resolution to provide reliable measurement benchmark.
8.Transmission adopt international famous brand AMETEK PITTMAN, M series as the DC servo motor speed loop drive unit.
9. Software provides a powerful platform to develop and run test procedure.
10. Triaxial guide work adopts RENISHAW six linear compensation unit and two work-piece compensation unit, ensure the accuracy and reliability of real-time compensation, greatly reduces the limitations of measuring the required environment;
Probe Choices:
| PH10M+SP25 | REVO | |
| | |
Details:
| | |
